A Reconfigurable RF MEMS Triple Stub Impedance Matching Network

Author

Unlu, M. ; Topalli, K. ; Atasoy, H.I. ; Temocin, E.U. ; Istanbulluoglu, I. ; Bayraktar, O. ; Demir, S. ; Civi, O.A. ; Koc, S. ; Akin, T.

Author_Institution

Dept. of Electr.-Electron. Eng., Middle East Tech. Univ., Ankara

fYear

2006

fDate

10-15 Sept. 2006

Firstpage

1370

Lastpage

1373

Abstract

This paper presents a reconfigurable triple stub impedance matching network using RF MEMS technology centered at 10GHz. The device is capable of covering impedances on the whole Smith Chart. The device structure consists of three variable length stubs which are designed as distributed MEMS transmission lines and two lambda_g/8 length CPW transmission lines connecting the stubs. The variable length stubs are implemented with 12 MEMS switches over CPW lines and CPW lines connecting the switches. lambda_g/8 spacing between the stubs is selected to obtain a uniform distribution of the impedance points on the Smith Chart. Initial measurement results of the fabricated structure show a good agreement with the simulation results

Keywords

coplanar waveguides; microswitches; radiofrequency integrated circuits; 10 GHz; CPW transmission lines; MEMS loaded line; MEMS switches; RF MEMS; Smith Chart; matching network; microwave integrated circuits; triple stub impedance; tuners; Coplanar waveguides; Frequency; Impedance matching; Integrated circuit interconnections; Micromechanical devices; Microswitches; Power transmission lines; Radiofrequency microelectromechanical systems; Switches; Tuners; MEMS loaded line; MEMS switch; RF MEMS; Tuners; microwave integrated circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2006. 36th European

Conference_Location

Manchester

Print_ISBN

2-9600551-6-0

Type

conf

DOI

10.1109/EUMC.2006.281272

Filename

4058088