Title :
Usage of Laser Timing Probe for Sensing of Programmed Charges in EEPROM Devices
Author :
Bidani, Liron ; Baharav, Oded ; Sinvani, Moshe ; Zalevsky, Zeev
Author_Institution :
Fac. of Electr. Eng., Bar-Ilan Univ., Ramat Gan, Israel
Abstract :
A method to measure programmed charges in EEPROM devices is presented. The measurement of the charges was made with subtraction of images captured using a laser timing probe. The effect of the charges is expressed over the captured images due to the plasma dispersion effect.
Keywords :
EPROM; charge measurement; measurement by laser beam; optical dispersion; optical sensors; probes; EEPROM device; image subtraction; laser timing probe; measurement by laser beam; plasma dispersion effect; programmed charge measurement; programmed charge sensing; EPROM; Laser beams; Logic gates; Measurement by laser beam; Microscopy; Optical imaging; Probes; Measurement by laser beam; measurements technique; microscopy; optics;
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
DOI :
10.1109/TDMR.2013.2272218
