Title :
PDMS dry etching for higher integration of cells culture microchambers: application to Hep G2 cells
Author :
Leclerc, E. ; Sakai, Y. ; Fujii, T.
Abstract :
A microdevice composed of six stacked PDMS layers is presented. On both sides of the layers, microchannel networks are microfabricated. To promote a 3D arrangement of the cells, the layers are molded against a SU-8 master with 3D microstructure. After the photolithography patterning and Al etching, the PDMS layer is dry-etched by plasma. Only SF/sub 6/ gas was used, with an etching rate around 30 to 40 /spl mu/m for one hour and a half. The microdevice is built by bonding all the layers one by one, and is connected to the perfusion system. For the cells culture, human hepatocarcinoma cells are used.
Keywords :
adhesion; aluminium; cancer; cellular biophysics; chemical analysis; micromachining; moulding; photolithography; polymer films; sputter etching; Al; Hep G2 cells; PDMS layer; SF/sub 6/; SF/sub 6/ dry etching; SU-8 master mold 3D microstructure; cells culture microchambers; etching rate; human hepatocarcinoma cells; layer bonding; microchannel networks; microfabrication; perfusion system; photolithography; Aluminum; Biological materials; Dry etching; Microchannel; Microfluidics; Plasma applications; Plasma properties; Resists; Sulfur hexafluoride; Tissue engineering;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-031-3
DOI :
10.1109/IMNC.2002.1178650
