Title :
Characterizations of adhesion and motion behavior for electrothermal actuator
Author :
Yen-Jyh Lai ; Chengkuo Lee ; Chia-Yu Wu ; Wen-Chih Chen ; Chihchung Chen ; Weileun Fang ; Yeh, J.-L.A. ; Ruey-Shing Huang
Author_Institution :
Asia Pacific Microsystems Inc., Hsinchu, Taiwan
Abstract :
The authors investigate the motion behavior of a U-shaped actuator, and discuss relations between the observed results and the influence of accumulated charge. It is concluded that the proper design of such an actuator should include a poly-Si underlayer in order to avoid the space charge effect. This result will help in the fabrication of optical and RF MEMS devices with good reliability performance when the U-shaped electrothermal actuator is adopted to drive or control moving structures.
Keywords :
adhesion; elemental semiconductors; micro-optics; microactuators; optical fabrication; reliability; silicon; space charge; MEMS fabrication; RF MEMS devices; Si; U-shaped electrothermal actuator; accumulated charge; adhesion; motion behavior; optical MEMS devices; poly-Si underlayer; reliability; space charge effect; Actuators; Adhesives; Displacement measurement; Electric variables measurement; Electrothermal effects; Microactuators; Micromechanical devices; Silicon; Space charge; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-031-3
DOI :
10.1109/IMNC.2002.1178666
