Self-assembly of micro-stage using micro-origami technique on GaAs

Summary form only given. A simple method to make self-positioned micromachined structure is desirable to fabricate complex 3-dimensional structures for micro-electro-mechanical-system. Recently, we demonstrated a method to make self-positioned micromachined structures by using a hinge which is composed of a pair of lattice-mismatched epitaxial layers. As an application example, a standing mirror was fabricated using epitaxial growth of III-V compound semiconductors. In this study, we propose a method to make more complex structure using two types of hinges which bend toward opposite directions like "tani-ori" (valley-fold) and "yama-ori" (mountain-fold) in origami.