Title :
Precision motion control system for ultra-precision semiconductor and electronic components manufacturing
Author :
Tan, K.K. ; Dou, H.F. ; Tang, K.Z.
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
Abstract :
In this paper, the development of a motion control system for ultra-precision semiconductor and electronic components manufacturing is presented. The control system is generally applicable, but it is developed with a particular focus on direct drive servo systems based on linear motors. The overall control system is comprehensive, comprising of various selected control and instrumentation components, integrated within a configuration of hardware architecture centred around a dSPACE DS1004 DSP processor board. These components include a precision composite controller (comprising of feedforward and feedback control), a disturbance observer, an adaptive notch filter, and a geometrical error compensator. The hardware architecture, software development platform, user interface, and all constituent control components will be elaborated on in the paper
Keywords :
adaptive filters; electron device manufacture; error compensation; feedback; feedforward; linear motors; motion control; notch filters; observers; process control; semiconductor device manufacture; servomechanisms; adaptive notch filter; dSPACE DS1004 DSP processor board; direct drive servo system; disturbance observer; feedback control; feedforward control; geometrical error compensator; hardware architecture; instrumentation configuration; linear motor; motion control system; precision composite controller; software development platform; ultra-precision electronic component manufacturing; ultra-precision semiconductor manufacturing; user interface; Computer architecture; Control systems; Electronic components; Hardware; Instruments; Motion control; Pulp manufacturing; Semiconductor device manufacture; Servomechanisms; Servomotors;
Conference_Titel :
Electronic Components and Technology Conference, 2001. Proceedings., 51st
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-7038-4
DOI :
10.1109/ECTC.2001.928012
