Title :
Investigation of On-Wafer TRL Calibration Accuracy Dependence on Transitions and Probe Positioning
Author :
Atasoy, H.I. ; Unlu, M. ; Topalli, K. ; Istanbulluoglu, I. ; Temocin, E.U. ; Bayraktar, O. ; Demir, S. ; Civi, O. ; Koc, S. ; Akin, T.
Author_Institution :
Dept. of Electr.-Electron. Eng., Middle East Tech. Univ., Ankara
Abstract :
This paper presents the effects of various transition types from the measurement plane to the reference plane in TRL calibration and probe positioning effects for on wafer measurements of CPW based devices. Fourteen different transition types, with direct, linear and exponential transitions, including 3 different variations of ground-signal-ground (GSG) spacing are examined. To observe the performance of the transitions, simple CPW transmission lines of different characteristic impedances are fabricated using standard lithography techniques on glass substrate and S-parameters are measured in 4.5-20 GHz band. Results are compared with electromagnetic simulations. The effects of probe misplacement along the lateral and horizontal axis are also investigated
Keywords :
S-parameters; calibration; coplanar transmission lines; coplanar waveguide components; waveguide transitions; 4.5 to 20 GHz; CPW based devices; CPW transmission lines; S-parameters; electromagnetic simulations; glass substrate; ground-signal-ground spacing; on-wafer TRL calibration accuracy dependence; probe positioning; standard lithography techniques; Calibration; Coplanar waveguides; Glass; Impedance; Lithography; Measurement standards; Position measurement; Probes; Scattering parameters; Transmission line measurements; Calibration; TRL; coplanar waveguide; transmission line transitions;
Conference_Titel :
Microwave Conference, 2006. 36th European
Conference_Location :
Manchester
Print_ISBN :
2-9600551-6-0
DOI :
10.1109/EUMC.2006.281401
