DocumentCode

3167493

Title

Session #5 SOI photonics, MEMS, sensors, and circuits

Author

Hiramoto, Toshiro ; Kim, Dong-Won

Author_Institution

University of Tokyo, Japan

fYear

2008

fDate

6-9 Oct. 2008

Firstpage

83

Lastpage

84

Keywords

Biosensors; Circuits; DNA; Gas detectors; Micromechanical devices; Micromirrors; Optical design; Optical device fabrication; Optical sensors; Optoelectronic and photonic sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 2008. SOI. IEEE International

Conference_Location

New Paltz, NY

ISSN

1078-621X

Print_ISBN

978-1-4244-1954-8

Electronic_ISBN

1078-621X

Type

conf

DOI

10.1109/SOI.2008.4656305

Filename

4656305