Title :
Session #6 Materials and 3D technologies
Author :
Mazure, Carlos ; Suntharalingam, Vyshnavi
Author_Institution :
Soitec, France
Keywords :
Aluminum nitride; Clocks; Insulation; Integrated circuit technology; Laboratories; Microstrip; Substrates; Thermal conductivity; Transistors;
Conference_Titel :
SOI Conference, 2008. SOI. IEEE International
Conference_Location :
New Paltz, NY
Print_ISBN :
978-1-4244-1954-8
Electronic_ISBN :
1078-621X
DOI :
10.1109/SOI.2008.4656313
