DocumentCode

3167667

Title

Session #6 Materials and 3D technologies

Author

Mazure, Carlos ; Suntharalingam, Vyshnavi

Author_Institution

Soitec, France

fYear

2008

fDate

6-9 Oct. 2008

Firstpage

99

Lastpage

100

Keywords

Aluminum nitride; Clocks; Insulation; Integrated circuit technology; Laboratories; Microstrip; Substrates; Thermal conductivity; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 2008. SOI. IEEE International

Conference_Location

New Paltz, NY

ISSN

1078-621X

Print_ISBN

978-1-4244-1954-8

Electronic_ISBN

1078-621X

Type

conf

DOI

10.1109/SOI.2008.4656313

Filename

4656313