Title :
Session #7 Multi-gate SOI device
Author :
Jurczak, Malgorzata ; Wade Xiong
Author_Institution :
IMEC, Belgium
Keywords :
CMOS technology; Dielectric devices; FETs; FinFETs; Geometry; Instruments; Jamming; Nanoscale devices; Silicon; Tin;
Conference_Titel :
SOI Conference, 2008. SOI. IEEE International
Conference_Location :
New Paltz, NY
Print_ISBN :
978-1-4244-1954-8
Electronic_ISBN :
1078-621X
DOI :
10.1109/SOI.2008.4656320
