DocumentCode

3167811

Title

Session #7 Multi-gate SOI device

Author

Jurczak, Malgorzata ; Wade Xiong

Author_Institution

IMEC, Belgium

fYear

2008

fDate

6-9 Oct. 2008

Firstpage

113

Lastpage

114

Keywords

CMOS technology; Dielectric devices; FETs; FinFETs; Geometry; Instruments; Jamming; Nanoscale devices; Silicon; Tin;

fLanguage

English

Publisher

ieee

Conference_Titel

SOI Conference, 2008. SOI. IEEE International

Conference_Location

New Paltz, NY

ISSN

1078-621X

Print_ISBN

978-1-4244-1954-8

Electronic_ISBN

1078-621X

Type

conf

DOI

10.1109/SOI.2008.4656320

Filename

4656320