DocumentCode
3167833
Title
Micromachined optical sensor
Author
Tran, A.T.T.D. ; Haronian, D. ; Switz, N.A. ; Lo, Y.H. ; MacDonald, N.
Author_Institution
Sch. of Appl. & Eng. Phys., Cornell Univ., Ithaca, NY, USA
fYear
1995
fDate
7-9 Aug 1995
Firstpage
189
Lastpage
193
Abstract
We report the fabrication and testing of a surface micromachined optical deformation sensor. The sensing element is a suspended mirror which forms part of a Fabry-Perot interferometer. In the presence of an external force, shift in interference fringe as well as change in power spectral density was observed. The sensor exhibits linear response to external applied force and has resonant frequency of 15 kHz for a symmetric double serpentine springs geometry
Keywords
Fabry-Perot interferometers; micromachining; optical fabrication; optical sensors; strain sensors; 15 kHz; Fabry-Perot interferometer; fabrication; linear response; optical deformation sensor; power spectral density; resonant frequency; surface micromachining; suspended mirror; symmetric double serpentine springs; testing; Fabry-Perot interferometers; Force sensors; Interference; Mirrors; Optical device fabrication; Optical interferometry; Optical sensors; Resonant frequency; Springs; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
High Speed Semiconductor Devices and Circuits, 1995. Proceedings., IEEE/Cornell Conference on Advanced Concepts in
Conference_Location
Ithaca, NY
ISSN
1079-4700
Print_ISBN
0-7803-3970-3
Type
conf
DOI
10.1109/CORNEL.1995.482434
Filename
482434
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