Title :
Micromachined optical sensor
Author :
Tran, A.T.T.D. ; Haronian, D. ; Switz, N.A. ; Lo, Y.H. ; MacDonald, N.
Author_Institution :
Sch. of Appl. & Eng. Phys., Cornell Univ., Ithaca, NY, USA
Abstract :
We report the fabrication and testing of a surface micromachined optical deformation sensor. The sensing element is a suspended mirror which forms part of a Fabry-Perot interferometer. In the presence of an external force, shift in interference fringe as well as change in power spectral density was observed. The sensor exhibits linear response to external applied force and has resonant frequency of 15 kHz for a symmetric double serpentine springs geometry
Keywords :
Fabry-Perot interferometers; micromachining; optical fabrication; optical sensors; strain sensors; 15 kHz; Fabry-Perot interferometer; fabrication; linear response; optical deformation sensor; power spectral density; resonant frequency; surface micromachining; suspended mirror; symmetric double serpentine springs; testing; Fabry-Perot interferometers; Force sensors; Interference; Mirrors; Optical device fabrication; Optical interferometry; Optical sensors; Resonant frequency; Springs; Testing;
Conference_Titel :
High Speed Semiconductor Devices and Circuits, 1995. Proceedings., IEEE/Cornell Conference on Advanced Concepts in
Conference_Location :
Ithaca, NY
Print_ISBN :
0-7803-3970-3
DOI :
10.1109/CORNEL.1995.482434
