• DocumentCode
    3168085
  • Title

    Far infrared Ga1-xInxSb/InAs-based strained-layer superlattice detectors grown by OMVPE

  • Author

    Jahan, Mirza M. ; Anwar, A.F.M.

  • Author_Institution
    Dept. of Electr. & Syst. Eng., Connecticut Univ., Storrs, CT, USA
  • fYear
    1995
  • fDate
    7-9 Aug 1995
  • Firstpage
    288
  • Lastpage
    295
  • Abstract
    Strained-layer, type-II Ga1-xInxSb/InAs superlattice detectors operating at 9 μm have been grown for the first time by OMVPE. In all reported literature thus far, MBE has been exclusively used to grow this particular material system. In the present research, the material was grown by an atmospheric pressure OMVPE reactor using high purity metallorganic precursors (TM Ga, TMSb, TMIn and TBAs). A 300 Å of Ga1-xInxSb buffer layer was grown on n-GaAs(100) substrate followed by 20 periods (60 Å Ga0.6In0.4Sb/60 Å InAs) superlattice. A 300 Å InAs was grown as the capping layer. The growth took place at 600°C with a precracker temperature of 140°C. The absorbance characteristics measured by FTIR showed a shift in the cutoff wavelength λ from 1.8 μm to 2.5 μm when the In mole fraction was varied from 0.1 to 0.4 in Ga1-xIn xSb layer. The use of InAs in Ga0.6In0.4Sb/InAs structures introduces strain and λ shifts from 2.5 μm to 9 μm as confirmed by FTIR. An increase in the number of superlattice periods (from 5 to 20) resulted in an enhanced absorbance edge. p-n photodiodes were fabricated by establishing AuGe/Ni/AuGe contacts on InAs and n-GaAs. The samples were sintered at 430°C for 10 minutes in N2 ambient. The samples were measured to show good I-V and R-V characteristics. The detector was edge-excited using white light to show change in conductance. The measured leakage current (1 mA<at a bias of -0.2 V) and was attributed to the lattice mismatch between GaAs and Ga0.6 In0.4Sb (~8%). A reduction in leakage current (or, improved electrical characteristics) is currently under investigation using a GaSb substrate
  • Keywords
    Fourier transform spectroscopy; III-V semiconductors; gallium compounds; indium compounds; infrared detectors; infrared spectroscopy; leakage currents; photodiodes; semiconductor growth; semiconductor superlattices; vapour phase epitaxial growth; 140 C; 430 C; 600 C; 9 micron; AuGe-Ni-AuGe-GaAs; AuGe-Ni-AuGe-InAs; FIR detector; FTIR spectroscopy; Ga1-xInxSb/InAs-based superlattice; GaInSb-InAs; I-V characteristics; N2; OMVPE growth; R-V characteristics; absorbance characteristics; atmospheric pressure OMVPE reactor; cutoff wavelength shift; far infrared detector; high purity metallorganic precursors; leakage current; p-n photodiodes; strained-layer superlattice detectors; Buffer layers; Capacitive sensors; Detectors; Inductors; Inorganic materials; Leakage current; Photodiodes; Superlattices; Temperature; Wavelength measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    High Speed Semiconductor Devices and Circuits, 1995. Proceedings., IEEE/Cornell Conference on Advanced Concepts in
  • Conference_Location
    Ithaca, NY
  • ISSN
    1079-4700
  • Print_ISBN
    0-7803-3970-3
  • Type

    conf

  • DOI
    10.1109/CORNEL.1995.482446
  • Filename
    482446