DocumentCode :
3168085
Title :
Far infrared Ga1-xInxSb/InAs-based strained-layer superlattice detectors grown by OMVPE
Author :
Jahan, Mirza M. ; Anwar, A.F.M.
Author_Institution :
Dept. of Electr. & Syst. Eng., Connecticut Univ., Storrs, CT, USA
fYear :
1995
fDate :
7-9 Aug 1995
Firstpage :
288
Lastpage :
295
Abstract :
Strained-layer, type-II Ga1-xInxSb/InAs superlattice detectors operating at 9 μm have been grown for the first time by OMVPE. In all reported literature thus far, MBE has been exclusively used to grow this particular material system. In the present research, the material was grown by an atmospheric pressure OMVPE reactor using high purity metallorganic precursors (TM Ga, TMSb, TMIn and TBAs). A 300 Å of Ga1-xInxSb buffer layer was grown on n-GaAs(100) substrate followed by 20 periods (60 Å Ga0.6In0.4Sb/60 Å InAs) superlattice. A 300 Å InAs was grown as the capping layer. The growth took place at 600°C with a precracker temperature of 140°C. The absorbance characteristics measured by FTIR showed a shift in the cutoff wavelength λ from 1.8 μm to 2.5 μm when the In mole fraction was varied from 0.1 to 0.4 in Ga1-xIn xSb layer. The use of InAs in Ga0.6In0.4Sb/InAs structures introduces strain and λ shifts from 2.5 μm to 9 μm as confirmed by FTIR. An increase in the number of superlattice periods (from 5 to 20) resulted in an enhanced absorbance edge. p-n photodiodes were fabricated by establishing AuGe/Ni/AuGe contacts on InAs and n-GaAs. The samples were sintered at 430°C for 10 minutes in N2 ambient. The samples were measured to show good I-V and R-V characteristics. The detector was edge-excited using white light to show change in conductance. The measured leakage current (1 mA<at a bias of -0.2 V) and was attributed to the lattice mismatch between GaAs and Ga0.6 In0.4Sb (~8%). A reduction in leakage current (or, improved electrical characteristics) is currently under investigation using a GaSb substrate
Keywords :
Fourier transform spectroscopy; III-V semiconductors; gallium compounds; indium compounds; infrared detectors; infrared spectroscopy; leakage currents; photodiodes; semiconductor growth; semiconductor superlattices; vapour phase epitaxial growth; 140 C; 430 C; 600 C; 9 micron; AuGe-Ni-AuGe-GaAs; AuGe-Ni-AuGe-InAs; FIR detector; FTIR spectroscopy; Ga1-xInxSb/InAs-based superlattice; GaInSb-InAs; I-V characteristics; N2; OMVPE growth; R-V characteristics; absorbance characteristics; atmospheric pressure OMVPE reactor; cutoff wavelength shift; far infrared detector; high purity metallorganic precursors; leakage current; p-n photodiodes; strained-layer superlattice detectors; Buffer layers; Capacitive sensors; Detectors; Inductors; Inorganic materials; Leakage current; Photodiodes; Superlattices; Temperature; Wavelength measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
High Speed Semiconductor Devices and Circuits, 1995. Proceedings., IEEE/Cornell Conference on Advanced Concepts in
Conference_Location :
Ithaca, NY
ISSN :
1079-4700
Print_ISBN :
0-7803-3970-3
Type :
conf
DOI :
10.1109/CORNEL.1995.482446
Filename :
482446
Link To Document :
بازگشت