DocumentCode
3168340
Title
Ultra-scaled Z-RAM cell
Author
Okhonin, S. ; Nagoga, M. ; Lee, C.-W. ; Colinge, J.P. ; Afzalian, A. ; Yan, R. ; Akhavan, N. Dehdashti ; Xiong, W. ; Sverdlov, V. ; Selberherr, S. ; Mazure, C.
Author_Institution
Innovative Silicon, PSE-B, Lausanne
fYear
2008
fDate
6-9 Oct. 2008
Firstpage
157
Lastpage
158
Abstract
Ultra-scaled Z-RAM cells based on MuGFETs are demonstrated for the first time. Effects of physical parameters such as channel doping concentration, fin width, and gate length on Z-RAM cell performance are discussed. Transient measurements and simulations prove that the basic operational principles are effective on Z-RAM cells with a gate length down to 12.5 nm.
Keywords
CMOS integrated circuits; MOSFET; doping profiles; random-access storage; CMOS integrated circuits; MuGFETs; doping concentration; multiple-gate MOSFET; numerical simulation; ultrascaled Z-RAM memory cells; Bipolar transistors; Capacitors; Conference proceedings; Doping; MOSFETs; Performance evaluation; Random access memory; Scalability; Silicon; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference, 2008. SOI. IEEE International
Conference_Location
New Paltz, NY
ISSN
1078-621X
Print_ISBN
978-1-4244-1954-8
Electronic_ISBN
1078-621X
Type
conf
DOI
10.1109/SOI.2008.4656342
Filename
4656342
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