DocumentCode
3168526
Title
RF micromachined varactors with wide tuning range
Author
Dec, A. ; Suyama, K.
Author_Institution
Dept. of Electr. Eng., Columbia Univ., New York, NY, USA
Volume
1
fYear
1998
fDate
7-12 June 1998
Firstpage
357
Abstract
Polysilicon surface micromachined varactors using two- and three-plate structures with 1.5:1 and 1.87:1 tuning ranges, respectively, are presented. The tuning ranges are near-theoretical limits and can be obtained within 4.4 V control voltage. The two-plate varactor has a nominal capacitance of 2.05 pF and a Q-factor of 20 at 1 GHz.
Keywords
Q-factor; UHF devices; elemental semiconductors; micromachining; micromechanical devices; silicon; tuning; varactors; 1 GHz; 2.05 pF; 4.4 V; MUMPS; Q-factor; RF micromachined varactors; Si; polysilicon surface micromachined varactors; three-plate structure; two-plate structure; wide tuning range; Filters; Gold; Parasitic capacitance; Q factor; Radio frequency; Springs; Tuning; Varactors; Voltage; Voltage-controlled oscillators;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1998 IEEE MTT-S International
Conference_Location
Baltimore, MD, USA
ISSN
0149-645X
Print_ISBN
0-7803-4471-5
Type
conf
DOI
10.1109/MWSYM.1998.689392
Filename
689392
Link To Document