DocumentCode :
3168763
Title :
Principle and simulation of correlation steered scanning for SPM to overcome thermal drift
Author :
Liansheng Zhang ; Qian Long ; Chengliang Pan ; Zhihua Feng
Author_Institution :
Dept. of Precision Machinery & Precision Instrum., Univ. of Sci. & Technol. of China, Hefei, China
fYear :
2013
fDate :
22-23 Oct. 2013
Firstpage :
327
Lastpage :
331
Abstract :
A new scanning strategy named correlation steered scanning for Scanning Probe Microscopy (SPM) is proposed in this paper. Different from the traditional raster scanning, this method adopts scanning band by band. A narrow band of the sample is scanned at first, and then a band with a partial overlap to the first one is scanned reversely. Each band is composed of several blocks. The overlap between blocks in the corresponding position of two adjacent bands is utilized to estimate the relative drift speed in real-time based on the digital image correlation technique. Estimated results are employed to steer the following block scanning in order to keep the bands overlapped and parallel to one another. A large area can be scanned completely by repeating this process, without missing any information of the sample. When all the bands are scanned, a data processing program is applied to calibrate the thermal drift with the estimated drift speed, and the redundant areas caused by the overlap is corrected using a bilinear interpolation, then a very large area and drift-free image can be obtained. An arbitrarily large area can be scanned theoretically, because the drift within a small block can be estimated and compensated using the correlation steered scanning method in real-time. Experiments by simulating with a gray scale image were conducted and excellent result had been achieved. This method will be very useful for SPMs aimed at ultrahigh precision and large scan area.
Keywords :
correlation methods; image colour analysis; interpolation; scanning probe microscopy; SPM; bilinear interpolation; block scanning; correlation steered scanning; data processing program; digital image correlation technique; drift-free image; gray scale image; raster scanning; scanning probe microscopy; scanning strategy; thermal drift; ultrahigh precision area; Calibration; Correlation; Head; Interpolation; Microscopy; Probes; Real-time systems; correlation steered scanning; digital image correlation; image correction; scanning probe microscopy; thermal drift;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Imaging Systems and Techniques (IST), 2013 IEEE International Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4673-5790-6
Type :
conf
DOI :
10.1109/IST.2013.6729715
Filename :
6729715
Link To Document :
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