• DocumentCode
    316942
  • Title

    Data optimization in semiconductor manufacturing

  • Author

    Acree, David A. ; Matsubara, Kenji

  • Author_Institution
    Fujitsu AMD Semicond. Ltd., Fukushima, Japan
  • fYear
    1997
  • fDate
    35589
  • Firstpage
    117
  • Lastpage
    120
  • Abstract
    In today´s fast paced world of automation and computers, collection of data is easier than ever. Unfortunately, data collection ease can frequently produce more data than is actually needed for good decision making. This proliferation of data collection can actually impede manufacturing efficiency. Data can be optimized in the sense that less data can be collected while actually getting better information. This paper gives an approach that was applied in reducing data collection in a modern semiconductor fab operation that was still ramping production. While data was reduced, information for decision making was improved. The approach is detailed step by step. A brief example of actual optimization activity is described
  • Keywords
    management; manufacturing data processing; optimisation; semiconductor device manufacture; data optimization; decision making; management; semiconductor manufacturing; Computer aided manufacturing; Data mining; Databases; Guidelines; Impedance; Manufacturing automation; Personnel; Sampling methods; Semiconductor device manufacture; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Statistical Metrology, 1997 2nd International Workshop on
  • Conference_Location
    Kyoto
  • Print_ISBN
    0-7803-3737-9
  • Type

    conf

  • DOI
    10.1109/IWSTM.1997.629428
  • Filename
    629428