DocumentCode
316942
Title
Data optimization in semiconductor manufacturing
Author
Acree, David A. ; Matsubara, Kenji
Author_Institution
Fujitsu AMD Semicond. Ltd., Fukushima, Japan
fYear
1997
fDate
35589
Firstpage
117
Lastpage
120
Abstract
In today´s fast paced world of automation and computers, collection of data is easier than ever. Unfortunately, data collection ease can frequently produce more data than is actually needed for good decision making. This proliferation of data collection can actually impede manufacturing efficiency. Data can be optimized in the sense that less data can be collected while actually getting better information. This paper gives an approach that was applied in reducing data collection in a modern semiconductor fab operation that was still ramping production. While data was reduced, information for decision making was improved. The approach is detailed step by step. A brief example of actual optimization activity is described
Keywords
management; manufacturing data processing; optimisation; semiconductor device manufacture; data optimization; decision making; management; semiconductor manufacturing; Computer aided manufacturing; Data mining; Databases; Guidelines; Impedance; Manufacturing automation; Personnel; Sampling methods; Semiconductor device manufacture; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Statistical Metrology, 1997 2nd International Workshop on
Conference_Location
Kyoto
Print_ISBN
0-7803-3737-9
Type
conf
DOI
10.1109/IWSTM.1997.629428
Filename
629428
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