On-chip metamaterial transmission-line based on stacked split-ring resonator for millimeter-wave LSIs

This paper proposes a method to realize on-chip metamaterial transmission-line. Since the resonant frequency of split-ring resonator (SRR) depends on the size strongly, it is difficult to realize metamaterial transmission-line in integrated circuits. If we implement a conventional SRR to on-chip transmission-line, the resonant frequency is around 200 GHz. We propose a stacked SRR using on-chip multi-layer interconnect. The stacked SRR is evaluated by a field-solver and the experimental results verify that the stacked SRR can realize the resonant frequency below 60 GHz.