Title :
The integration of GaAs vertical-cavity surface emitting lasers onto silicon circuitry
Author :
Fathollahnejad, H. ; Daryanani, S. ; Mathine, D.L. ; Chuang, C.P. ; Droopad, R. ; Maracas, G.N.
Author_Institution :
Dept. of Electr. Eng., Arizona State Univ., Tempe, AZ, USA
Abstract :
An InGaAs-AlGaAs vertical cavity surface emitting laser has been integrated following substrate removal onto a CMOS inverter chip. Digital modulation of the laser is shown
Keywords :
CMOS digital integrated circuits; III-V semiconductors; aluminium compounds; gallium arsenide; indium compounds; integrated circuit technology; integrated optoelectronics; laser cavity resonators; optical modulation; semiconductor laser arrays; silicon; surface emitting lasers; CMOS inverter chip; InGaAs-AlGaAs; Si; Si circuitry; VCSEL; digital modulation; surface emitting lasers; vertical-cavity SEL; Circuits; Etching; Gallium arsenide; Optical arrays; Optical device fabrication; Optical films; Silicon; Substrates; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
High Speed Semiconductor Devices and Circuits, 1995. Proceedings., IEEE/Cornell Conference on Advanced Concepts in
Conference_Location :
Ithaca, NY
Print_ISBN :
0-7803-3970-3
DOI :
10.1109/CORNEL.1995.482530
