AC actuation of fixed-fixed beam MEMS switches

In this paper, an actuation scheme of RF microelectromechanical systems (MEMS) switches based on a combined DC and AC actuation voltage (AC actuation) is proposed and numerically simulated. Compared to the conventional electrostatic actuation, AC actuation requires a much smaller actuation voltage, which is more suitable for low-voltage application, including wireless phones and sensors. The frequency of the AC component (actuation frequency) is very close to the mechanical resonant frequency of the MEMS structure beam. A parametric study on the effects of switch geometry, residual stress, and quality factor on the switch actuation voltage and switching time is performed in this work and specific design guidelines are provided for practical designs