Title :
Self-assembled micro-XYZ stages for optical scanning and alignment
Author :
Fan, Li ; Lee, Shi-Sheng ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
Summary form only given. In summary, a fully actuated micro-XYZ stage with bi-directional scratch drive actuator array has been demonstrated for the first time. This fabrication process of this micro-XYZ is fully compatible with the free-space micro-optical bench technology. This allows high performance free-space optical systems to be monolithically integrated on a chip
Keywords :
actuators; arrays; integrated optoelectronics; micromechanical devices; optical fabrication; optical scanners; position control; actuated micro-XYZ stage; bi-directional scratch drive actuator array; chip; fabrication process; free-space micro-optical bench technology; high performance free-space optical systems; monolithically integrated; optical alignment; optical scanning; self-assembled micro-XYZ stages; Actuators; Assembly; Bidirectional control; Integrated optics; Lenses; Micromachining; Microoptics; Optical devices; Optical feedback; Optical sensors;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1997. LEOS '97 10th Annual Meeting. Conference Proceedings., IEEE
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3895-2
DOI :
10.1109/LEOS.1997.630618
