• DocumentCode
    3172775
  • Title

    SEM investigations of the surface and cross-section features of ZnO NWs under FIB treatment

  • Author

    Shmavonyan, G. Sh

  • Author_Institution
    Eng. Univ. of Armenia, Yerevan
  • fYear
    2007
  • fDate
    16-20 Dec. 2007
  • Firstpage
    385
  • Lastpage
    388
  • Abstract
    We investigated vapour phase epitaxy (VPE)-grown ZnO nano-wires (NWs) on a Si substrate by scanning electron microscopy (SEM). SEM investigations show that there are single NWs and ensembles of NWs, among which we found straight and bend, perfect and non-perfect NWs, as well as NWs with clean surfaces and surfaces with the dark spots and features. After focused ion beam (FIB) polishing we found that every NW has a clean homogeneous surface, which allow us to conclude that all those dark spots and surface features of the NWs really are just surface features. The FIB milling gives information of the deeper interior of the NWs.
  • Keywords
    II-VI semiconductors; focused ion beam technology; ion beam effects; nanotechnology; nanowires; scanning electron microscopy; semiconductor epitaxial layers; semiconductor quantum wires; surface treatment; wide band gap semiconductors; zinc compounds; FIB milling; FIB treatment; SEM; Si; ZnO; focused ion beam polishing; nanowires; scanning electron microscopy; vapour phase epitaxy; Ion beams; Milling; Optical materials; Optical surface waves; Scanning electron microscopy; Substrates; Surface cleaning; Surface morphology; Surface treatment; Zinc oxide; FIB; SEM; cross-section; surface;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
  • Conference_Location
    Mumbai
  • Print_ISBN
    978-1-4244-1728-5
  • Electronic_ISBN
    978-1-4244-1728-5
  • Type

    conf

  • DOI
    10.1109/IWPSD.2007.4472527
  • Filename
    4472527