Title :
SEM investigations of the surface and cross-section features of ZnO NWs under FIB treatment
Author :
Shmavonyan, G. Sh
Author_Institution :
Eng. Univ. of Armenia, Yerevan
Abstract :
We investigated vapour phase epitaxy (VPE)-grown ZnO nano-wires (NWs) on a Si substrate by scanning electron microscopy (SEM). SEM investigations show that there are single NWs and ensembles of NWs, among which we found straight and bend, perfect and non-perfect NWs, as well as NWs with clean surfaces and surfaces with the dark spots and features. After focused ion beam (FIB) polishing we found that every NW has a clean homogeneous surface, which allow us to conclude that all those dark spots and surface features of the NWs really are just surface features. The FIB milling gives information of the deeper interior of the NWs.
Keywords :
II-VI semiconductors; focused ion beam technology; ion beam effects; nanotechnology; nanowires; scanning electron microscopy; semiconductor epitaxial layers; semiconductor quantum wires; surface treatment; wide band gap semiconductors; zinc compounds; FIB milling; FIB treatment; SEM; Si; ZnO; focused ion beam polishing; nanowires; scanning electron microscopy; vapour phase epitaxy; Ion beams; Milling; Optical materials; Optical surface waves; Scanning electron microscopy; Substrates; Surface cleaning; Surface morphology; Surface treatment; Zinc oxide; FIB; SEM; cross-section; surface;
Conference_Titel :
Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
Conference_Location :
Mumbai
Print_ISBN :
978-1-4244-1728-5
Electronic_ISBN :
978-1-4244-1728-5
DOI :
10.1109/IWPSD.2007.4472527