Title :
Characterization of ZnO thin films using scanning tunneling microscopy
Author :
Bahadur, Harish ; Samanta, S.B. ; Sharma, R.K. ; Chandra, Sudhir
Author_Institution :
Nat. Phys. Lab. Lab., New Delhi
Abstract :
Three dimensional profiles of the different surface locations of ZnO thin films grown by sol-gel spin process have been generated to observe growth pattern showing the growth mechanism of the films. The results not only help in controlling the parameters in growing high quality film for application in sensing devices using ZnO but also provide some understanding in the basic growth mechanisms.
Keywords :
scanning tunnelling microscopy; sol-gel processing; thin films; zinc compounds; ZnO; atomic arrangement; scanning tunneling microscopy; sol-gel spin process; thin film growth pattern; Corrugated surfaces; Microscopy; Rough surfaces; Semiconductor films; Semiconductor materials; Semiconductor thin films; Surface roughness; Transistors; Tunneling; Zinc oxide; ZnO thin films; atomic arrangement; scanning tunneling microscopy; sol-gel spin process;
Conference_Titel :
Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
Conference_Location :
Mumbai
Print_ISBN :
978-1-4244-1728-5
Electronic_ISBN :
978-1-4244-1728-5
DOI :
10.1109/IWPSD.2007.4472555
