DocumentCode
3173339
Title
Characterization of ZnO thin films using scanning tunneling microscopy
Author
Bahadur, Harish ; Samanta, S.B. ; Sharma, R.K. ; Chandra, Sudhir
Author_Institution
Nat. Phys. Lab. Lab., New Delhi
fYear
2007
fDate
16-20 Dec. 2007
Firstpage
479
Lastpage
482
Abstract
Three dimensional profiles of the different surface locations of ZnO thin films grown by sol-gel spin process have been generated to observe growth pattern showing the growth mechanism of the films. The results not only help in controlling the parameters in growing high quality film for application in sensing devices using ZnO but also provide some understanding in the basic growth mechanisms.
Keywords
scanning tunnelling microscopy; sol-gel processing; thin films; zinc compounds; ZnO; atomic arrangement; scanning tunneling microscopy; sol-gel spin process; thin film growth pattern; Corrugated surfaces; Microscopy; Rough surfaces; Semiconductor films; Semiconductor materials; Semiconductor thin films; Surface roughness; Transistors; Tunneling; Zinc oxide; ZnO thin films; atomic arrangement; scanning tunneling microscopy; sol-gel spin process;
fLanguage
English
Publisher
ieee
Conference_Titel
Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
Conference_Location
Mumbai
Print_ISBN
978-1-4244-1728-5
Electronic_ISBN
978-1-4244-1728-5
Type
conf
DOI
10.1109/IWPSD.2007.4472555
Filename
4472555
Link To Document