DocumentCode
3173359
Title
Fabrication of Passive Wireless Sensor by Pulsed Laser Scribing of Indium Tin Oxide
Author
Balki, Oguzhan ; Elsayed-Ali, Hani E.
Author_Institution
Dept. of Electr. & Comput. Eng., Old Dominion Univ., Norfolk, VA, USA
fYear
2009
fDate
20-23 Dec. 2009
Firstpage
1
Lastpage
3
Abstract
Passive wireless sensors have been studied by many groups as means of sensing chemical and physical properties in inaccessible locations without the need to include a power source at the sensor location. Indium tin oxide (ITO) thin films are attractive for gas sensing. In this work, we show that laser scribing can be effectively used to fabricate an antenna structure from ITO thin films. This structure is suitable for a wireless chemical sensor.
Keywords
gas sensors; indium compounds; laser beam applications; semiconductor materials; semiconductor thin films; thin film sensors; tin compounds; ITO; antenna structure; gas sensing; passive wireless sensors; pulsed laser scribing; thin films; wireless chemical sensor; Acoustic sensors; Biosensors; Chemical lasers; Chemical sensors; Indium tin oxide; Magnetic sensors; Optical device fabrication; Optical pulses; Transistors; Wireless sensor networks;
fLanguage
English
Publisher
ieee
Conference_Titel
New Technologies, Mobility and Security (NTMS), 2009 3rd International Conference on
Conference_Location
Cairo
Print_ISBN
978-1-4244-4765-7
Type
conf
DOI
10.1109/NTMS.2009.5384661
Filename
5384661
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