DocumentCode
3173575
Title
Nanoimprint technology and its applications
Author
Guo, L. Jay
Author_Institution
Univ. of Michigan, Ann Arbor
fYear
2007
fDate
16-20 Dec. 2007
Firstpage
533
Lastpage
533
Abstract
Summary form only given. Nanoimprint lithography (NIL) is an emerging technology for high-throughput nanoscale patterning. Nanoimprinting uses a hard mold to mechanically deform a polymer material to create nanoscale structures, which provides unprecedented resolution and speed in nanopatterning. This talk will give an overview of the material requirement for the successful pattern replication in NIL. Due to its compatibility with polymer materials, Nanoimprint and its variants naturally find unique applications in polymer-based devices, including organic electronics and photonics. To gain even higher speed patterning over large areas, a recently developed Roll-to-Roll Nanoimprint Lithography on flexible web will also be discussed.
Keywords
nanolithography; nanostructured materials; polymers; high-throughput nanoscale patterning; nanoimprint lithography; nanoscale structures; organic electronics; photonics; polymer material; polymer-based devices; Application software; Materials science and technology; Nanolithography; Nanopatterning; Nanoscale devices; Nanostructured materials; Nanostructures; Organic materials; Polymers; USA Councils;
fLanguage
English
Publisher
ieee
Conference_Titel
Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
Conference_Location
Mumbai
Print_ISBN
978-1-4244-1728-5
Electronic_ISBN
978-1-4244-1728-5
Type
conf
DOI
10.1109/IWPSD.2007.4472567
Filename
4472567
Link To Document