DocumentCode :
3173575
Title :
Nanoimprint technology and its applications
Author :
Guo, L. Jay
Author_Institution :
Univ. of Michigan, Ann Arbor
fYear :
2007
fDate :
16-20 Dec. 2007
Firstpage :
533
Lastpage :
533
Abstract :
Summary form only given. Nanoimprint lithography (NIL) is an emerging technology for high-throughput nanoscale patterning. Nanoimprinting uses a hard mold to mechanically deform a polymer material to create nanoscale structures, which provides unprecedented resolution and speed in nanopatterning. This talk will give an overview of the material requirement for the successful pattern replication in NIL. Due to its compatibility with polymer materials, Nanoimprint and its variants naturally find unique applications in polymer-based devices, including organic electronics and photonics. To gain even higher speed patterning over large areas, a recently developed Roll-to-Roll Nanoimprint Lithography on flexible web will also be discussed.
Keywords :
nanolithography; nanostructured materials; polymers; high-throughput nanoscale patterning; nanoimprint lithography; nanoscale structures; organic electronics; photonics; polymer material; polymer-based devices; Application software; Materials science and technology; Nanolithography; Nanopatterning; Nanoscale devices; Nanostructured materials; Nanostructures; Organic materials; Polymers; USA Councils;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
Conference_Location :
Mumbai
Print_ISBN :
978-1-4244-1728-5
Electronic_ISBN :
978-1-4244-1728-5
Type :
conf
DOI :
10.1109/IWPSD.2007.4472567
Filename :
4472567
Link To Document :
بازگشت