• DocumentCode
    3173575
  • Title

    Nanoimprint technology and its applications

  • Author

    Guo, L. Jay

  • Author_Institution
    Univ. of Michigan, Ann Arbor
  • fYear
    2007
  • fDate
    16-20 Dec. 2007
  • Firstpage
    533
  • Lastpage
    533
  • Abstract
    Summary form only given. Nanoimprint lithography (NIL) is an emerging technology for high-throughput nanoscale patterning. Nanoimprinting uses a hard mold to mechanically deform a polymer material to create nanoscale structures, which provides unprecedented resolution and speed in nanopatterning. This talk will give an overview of the material requirement for the successful pattern replication in NIL. Due to its compatibility with polymer materials, Nanoimprint and its variants naturally find unique applications in polymer-based devices, including organic electronics and photonics. To gain even higher speed patterning over large areas, a recently developed Roll-to-Roll Nanoimprint Lithography on flexible web will also be discussed.
  • Keywords
    nanolithography; nanostructured materials; polymers; high-throughput nanoscale patterning; nanoimprint lithography; nanoscale structures; organic electronics; photonics; polymer material; polymer-based devices; Application software; Materials science and technology; Nanolithography; Nanopatterning; Nanoscale devices; Nanostructured materials; Nanostructures; Organic materials; Polymers; USA Councils;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
  • Conference_Location
    Mumbai
  • Print_ISBN
    978-1-4244-1728-5
  • Electronic_ISBN
    978-1-4244-1728-5
  • Type

    conf

  • DOI
    10.1109/IWPSD.2007.4472567
  • Filename
    4472567