Resonance in micro-electro-mechanical systems

Summary form only given: Resonant microsystems have formed a cornerstone of research and development in MEMS since its early inception with applications ranging from wireless signal processing to environmental sensing. Increasingly, the creation of viable MEMS/NEMS device solutions is limited by the interfaces between energy domains. This paper examines the application of resonant mechanical amplification as a method to overcome the influence of lossy interfaces and inefficient transduction. The paper presents recent developments in resonant microsystems with applications to timing references and physical and biological sensors.