Title :
Resonance in micro-electro-mechanical systems
Abstract :
Summary form only given: Resonant microsystems have formed a cornerstone of research and development in MEMS since its early inception with applications ranging from wireless signal processing to environmental sensing. Increasingly, the creation of viable MEMS/NEMS device solutions is limited by the interfaces between energy domains. This paper examines the application of resonant mechanical amplification as a method to overcome the influence of lossy interfaces and inefficient transduction. The paper presents recent developments in resonant microsystems with applications to timing references and physical and biological sensors.
Keywords :
amplification; micromechanical devices; resonance; environmental sensing; lossy interfaces; micro electro mechanical systems; resonant mechanical amplification; resonant microsystems; wireless signal processing; Biomedical signal processing; Biosensors; Microelectromechanical systems; Micromechanical devices; Nanoelectromechanical systems; Research and development; Resonance; Timing; Wireless sensor networks;
Conference_Titel :
Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
Conference_Location :
Mumbai
Print_ISBN :
978-1-4244-1728-5
Electronic_ISBN :
978-1-4244-1728-5
DOI :
10.1109/IWPSD.2007.4472609
