A 3-D FEM based extractor for MEMS inductor with Monte-Carlo sampling

Author

Pande, Rajesh S. ; Jalgaonkar, Anoop ; Patrikar, Rajendra M.

Author_Institution

Visvesvaraya Nat. Inst. of Technol., Nagpur

fYear

2007

fDate

16-20 Dec. 2007

Firstpage

710

Lastpage

713

Abstract

An extraction tool developed with advanced algorithm to compute MEMS (Micro Electro Mechanical System) inductance is presented. The algorithm is based on solution of Laplace equation by Finite Element Method followed by current density computation. The energy of resulting magnetic field is estimated by Monte Carlo sampling. The extractor developed estimates precisely the inductance offered by MEMS inductor. The impact of micro surface roughness on the estimation of components is a concern because of surface to volume ratio increasing with scaling. The tool demonstrates the impact of micro surface roughness on the estimation of inductance.

Keywords

Laplace equations; Monte Carlo methods; current density; finite element analysis; micromechanical devices; microwave integrated circuits; surface roughness; 3D FEM; Laplace equation; MEMS inductor; Monte-Carlo sampling; current density computation; finite element method; magnetic field; microelectro mechanical system; microsurface roughness; Current density; Finite element methods; Inductance; Inductors; Laplace equations; Mechanical systems; Micromechanical devices; Rough surfaces; Sampling methods; Surface roughness; Finite element method; Inductance; Microelectromechanical devices; Rough surface;

fLanguage

English

Publisher

ieee

Conference_Titel

Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on

Conference_Location

Mumbai

Print_ISBN

978-1-4244-1728-5

Electronic_ISBN

978-1-4244-1728-5

Type

conf

DOI

10.1109/IWPSD.2007.4472619

Filename

4472619