Application of microelecromechanical resonators for the flow systems; microelectronic controls and data evaluation

Author

Seetharamu, S. ; Sarvanan, V. ; Pamidighantam, Sayanu ; Tyagi, Siddharth ; Gupta, Khushboo

Author_Institution

Central Power Res. Inst., Bangalore

fYear

2007

fDate

16-20 Dec. 2007

Firstpage

721

Lastpage

724

Abstract

Micro-electro-mechanical-systems (MEMS) Resonator chips having dimensions of 4.7times2.8 mm were fabricated and characterized for their electrical performance at Bharat Electronics Limited (BEL), Bangalore. By preparing an experimental setup the behavioral and electrical response of the resonator in the presence of various fluidic medium such as pure carbon dioxide, pure nitrogen, pure oxygen, various combinations of these three gases and certain transformer oils, under variable physical conditions was studied and standardized. We show the characteristics the resonator under various ambiences and the future scope of implementation of its properties for certain specific applications such as efficient fuel detection systems for various power plants by studying the flu gases emitted by the fuel intake.

Keywords

flue gases; gas sensors; micromechanical resonators; data evaluation; electrical response; flu gases; fuel detection systems; microelecromechanical resonators; microelectronic controls; size 2.8 mm; size 4.7 mm; Carbon dioxide; Control systems; Fluid flow control; Fuels; Gases; Microelectronics; Micromechanical devices; Nitrogen; Oil insulation; Power generation;

fLanguage

English

Publisher

ieee

Conference_Titel

Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on

Conference_Location

Mumbai

Print_ISBN

978-1-4244-1728-5

Electronic_ISBN

978-1-4244-1728-5

Type

conf

DOI

10.1109/IWPSD.2007.4472622

Filename

4472622