• DocumentCode
    3175851
  • Title

    ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153)

  • fYear
    2001
  • fDate
    19-22 March 2001
  • Abstract
    The following topics were dealt with: matching; parameter extraction; device characterization; RF technology; process charaterization; interconnects; reliability
  • Keywords
    integrated circuit testing; microelectronic test structures;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on
  • Conference_Location
    Kobe, Japan
  • Print_ISBN
    0-7803-6511-9
  • Type

    conf

  • DOI
    10.1109/ICMTS.2001.928626
  • Filename
    928626
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3175851