Title :
A study of measurement system noise for sensitive soft breakdown triggering
Author :
Schmitz, Jurriaan ; Tuinhout, Hans P.
Author_Institution :
Philips Res. Lab., Eindhoven, Netherlands
Abstract :
This work discusses a simple and effective method to determine the short-term repeatability of current measurements over a large range of currents. With this method, we obtain a quantitative estimate of the background fluctuations that obscure the soft breakdown signal of a large area MOS capacitor under constant voltage stress. Details of the fluctuations are discussed, as well as the consequences for soft breakdown detection
Keywords :
MOS capacitors; MOS integrated circuits; MOSFET; current fluctuations; integrated circuit measurement; integrated circuit noise; integrated circuit reliability; integrated circuit testing; semiconductor device breakdown; SiO2; background fluctuations; constant voltage stress; current measurements; current range; large area MOS capacitor; measurement system noise; sensitive soft breakdown triggering; short-term repeatability; soft breakdown detection; soft breakdown signal; Automatic testing; Breakdown voltage; Current measurement; Dielectric breakdown; Electric breakdown; Fluctuations; Instruments; MOS capacitors; Noise measurement; Stress;
Conference_Titel :
Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on
Conference_Location :
Kobe
Print_ISBN :
0-7803-6511-9
DOI :
10.1109/ICMTS.2001.928645
