Title :
Focused ion beam fabrication of photonic crystal structures
Author :
Hill, M. ; Cryan, M. ; Heard, P. ; Varrazza, R. ; Yu, S. ; Rorison, J.M.
Author_Institution :
University of Bristol
Keywords :
Circuits; Crystalline materials; Fabrication; Focusing; Ion beams; Lattices; Lithography; Photonic crystals; Semiconductor lasers; Sputter etching;
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
DOI :
10.1109/CLEOE.2003.1313453
