Title :
A new approach to characterize substrate losses of on-chip inductors
Author :
Schimpf, Klaus ; Benna, Bernhard ; Proetel, Dieter
Author_Institution :
Texas Instrum. Deutschland GmbH, Freising, Germany
Abstract :
A new approach to characterize substrate losses of on-chip inductors is presented, that attributes the losses to a frequency dependence of the series resistor RS of the equivalent circuit. The technique to extract RS(f) from y-parameters is described in detail. To demonstrate the important role of deembedding for accurate parameter extraction, several deembedding procedures are depicted and compared. As an example, results of a 5-turn inductor are discussed
Keywords :
equivalent circuits; inductors; integrated circuit packaging; losses; resistors; deembedding; deembedding procedures; equivalent circuit; inductor; losses; on-chip inductors; parameter extraction; series resistor frequency dependence; substrate losses; y-parameters; Contact resistance; Dielectric substrates; Electrical resistance measurement; Equivalent circuits; Frequency dependence; Inductors; Lead; Parasitic capacitance; Resonance; Skin effect;
Conference_Titel :
Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on
Conference_Location :
Kobe
Print_ISBN :
0-7803-6511-9
DOI :
10.1109/ICMTS.2001.928648
