DocumentCode :
3176421
Title :
Fabrication and optical characterization, of 2-dimensional Si
3
N
4
waveguides
Author :
Pucker, G. ; Crivellari, M. ; Bellutti, P. ; Lui, A. ; Daldosso, N. ; Cella, S. ; Girardini, M. ; Prakash, V.G. ; Pavesi, L.
Author_Institution :
ITC-IRST
fYear :
2003
fDate :
22-27 June 2003
Firstpage :
397
Lastpage :
397
Keywords :
Atomic force microscopy; Optical attenuators; Optical device fabrication; Optical refraction; Optical variables control; Optical waveguides; Planar waveguides; Rectangular waveguides; Scanning electron microscopy; Wet etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
Type :
conf
DOI :
10.1109/CLEOE.2003.1313460
Filename :
1313460
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3176421
