Title :
Test structure and method for capacitance extraction in multi-conductor systems
Author :
Ward, Brian ; Bordelon, Jim ; Prior, Scott ; Tranchina, B. ; Liu, Jiann
Author_Institution :
TestChip Technol. Inc., Plano, TX, USA
Abstract :
A charge based capacitance measurement (CBCM) method is generalized to a multi-conductor system. The test structure and approach is applicable for characterizing multi-interconnect configurations representative of design applications, providing a powerful tool for experimental characterization
Keywords :
capacitance measurement; integrated circuit interconnections; integrated circuit measurement; integrated circuit metallisation; capacitance extraction; characterization tool; charge based capacitance measurement method; design applications; multi-conductor system; multi-conductor systems; multi-interconnect configurations; test method; test structure; Capacitance measurement; Circuit simulation; Circuit testing; Current measurement; Data mining; Delay; Integrated circuit interconnections; Parasitic capacitance; Solid modeling; System testing;
Conference_Titel :
Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on
Conference_Location :
Kobe
Print_ISBN :
0-7803-6511-9
DOI :
10.1109/ICMTS.2001.928660
