Title :
A novel electrostatic servo capacitive vacuum sensor
Author :
Wang, Yuelin ; Esashi, M.
Author_Institution :
Dept. of Inf. & Electron. Eng., Zhejiang Univ., Hangzhou, China
Abstract :
A novel electrostatic servo capacitive vacuum sensor has been successfully fabricated using p++ silicon etch-stop and vacuum anodic bonding techniques. In order to maintain the reference cavity in high vacuum, a non-evaporable getter (NEG) is used as a small vacuum pump. The dynamic range of the sensor can be extended by a servo system. The pressure response of the sensor is good. The servo voltage vs pressure is measured and theoretical data agrees with the experimental results
Keywords :
capacitance measurement; electric sensing devices; electrostatic devices; etching; getters; micromachining; microsensors; servomechanisms; vacuum gauges; vacuum measurement; Si; capacitive vacuum sensor; dynamic range; electrostatic vacuum sensor; nonevaporable getter; p++ Si etch-stop; pressure response; reference cavity; servo system; small vacuum pump; vacuum anodic bonding technique; Bonding; Capacitive sensors; Dynamic range; Electrostatics; Etching; Gettering; Sensor systems; Servomechanisms; Silicon; Vacuum technology;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635739
