Fabry-Perot pressure sensor arrays for imaging surface pressure distributions

Author

Miller, M.F. ; Allen, M.G. ; Arkilic, E. ; Breuer, K.S. ; Schmidt, M.A.

Author_Institution

Phys. Sci. Inc., Andover, MA, USA

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1469

Abstract

A micromachined sensor array for mailing optical measurements of surface pressure distributions has been designed, fabricated and tested. Each sensor element in the array consists of a Fabry-Perot etalon fabricated from single-crystal silicon. Illuminating the sensor array with a near-infrared, tunable diode laser and detecting the reflected light intensity with an infrared camera allows remote, simultaneous recording of the reflectance signals from the entire array of passive sensors. Testing has been performed in a static pressure cell, and the results are compared to the predictions of design models. Also, imaging of arrays of sensors has been demonstrated

Keywords

Fabry-Perot interferometers; elemental semiconductors; infrared detectors; laser beam applications; microsensors; pressure measurement; pressure sensors; reflectivity; semiconductor device testing; silicon; silicon-on-insulator; Fabry-Perot etalon; Fabry-Perot pressure sensor arrays; Si; Si-SiO₂; array of passive sensor; design models; imaging surface pressure distribution; infrared camera; mailing; micromachined sensor array; near-IR tunable diode laser; optical measurement; reflectance signals; reflected light intensity; remote simultaneous recording; single-crystal silicon; static pressure cell; surface pressure distribution; Fabry-Perot; Image sensors; Infrared detectors; Optical arrays; Optical imaging; Optical recording; Optical sensors; Semiconductor laser arrays; Sensor arrays; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635742

Filename

635742