Title :
Fabry-Perot pressure sensor arrays for imaging surface pressure distributions
Author :
Miller, M.F. ; Allen, M.G. ; Arkilic, E. ; Breuer, K.S. ; Schmidt, M.A.
Author_Institution :
Phys. Sci. Inc., Andover, MA, USA
Abstract :
A micromachined sensor array for mailing optical measurements of surface pressure distributions has been designed, fabricated and tested. Each sensor element in the array consists of a Fabry-Perot etalon fabricated from single-crystal silicon. Illuminating the sensor array with a near-infrared, tunable diode laser and detecting the reflected light intensity with an infrared camera allows remote, simultaneous recording of the reflectance signals from the entire array of passive sensors. Testing has been performed in a static pressure cell, and the results are compared to the predictions of design models. Also, imaging of arrays of sensors has been demonstrated
Keywords :
Fabry-Perot interferometers; elemental semiconductors; infrared detectors; laser beam applications; microsensors; pressure measurement; pressure sensors; reflectivity; semiconductor device testing; silicon; silicon-on-insulator; Fabry-Perot etalon; Fabry-Perot pressure sensor arrays; Si; Si-SiO2; array of passive sensor; design models; imaging surface pressure distribution; infrared camera; mailing; micromachined sensor array; near-IR tunable diode laser; optical measurement; reflectance signals; reflected light intensity; remote simultaneous recording; single-crystal silicon; static pressure cell; surface pressure distribution; Fabry-Perot; Image sensors; Infrared detectors; Optical arrays; Optical imaging; Optical recording; Optical sensors; Semiconductor laser arrays; Sensor arrays; Testing;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635742
