DocumentCode
3176775
Title
Extended Abstracts of the First International Workshop on Junction Technology (IEEE Cat. No.00EX464)
fYear
2000
fDate
6-6 Dec. 2000
Abstract
Presents the front matter and table of contents for the conference proceedings.
Keywords
CMOS integrated circuits; integrated circuit technology; large scale integration; semiconductor junctions; CMOS LSI; junction technology; metal/metal junction; metal/silicon junction; silicide/silicon junction; ultra-shallow source/drain junction;
fLanguage
English
Publisher
ieee
Conference_Titel
Junction Technology, 2000, The first international workshop on, Extended abstracts of
Conference_Location
Makuhari, Japan
Print_ISBN
4-89114-008-9
Type
conf
DOI
10.1109/IWIT.2000.928767
Filename
928767
Link To Document