A Large-Displacement 3-DOF Flexure Parallel Mechanism with Decoupled Kinematics Structure

This paper proposes an XYZ-flexure parallel mechanism (FPM) with large displacement and decoupled kinematics structure. The large-displacement FPM has large motion range more than 1 mm. Moreover, the decoupled XYZ-stage has small cross-axis error and small parasitic rotation. In this study, the typical prismatic joints are investigated, and a new large-displacement prismatic joint using notch hinges is designed. The conceptual design of the FPM is proposed by assembling these modular prismatic joints, and then the optimal design of the FPM is conducted. The analytical models of linear stiffness and dynamics are derived using pseudo-rigid-body (PRB) method. Finally, the numerical simulation using ANSYS is conducted for modal analysis to verify the analytical dynamics equation. Experiments are conducted to verify the proposed design for linear stiffness, cross-axis error and parasitic rotation