DocumentCode
31770
Title
On Ultrafast Photoconductivity Dynamics and Crystallinity of Black Silicon
Author
Porte, H.P. ; Turchinovich, Dmitry ; Persheyev, S. ; Fan, Y. ; Rose, M.J. ; Jepsen, Peter Uhd
Author_Institution
Dept. of Photonics Eng., Tech. Univ. of Denmark, Lyngby, Denmark
Volume
3
Issue
3
fYear
2013
fDate
May-13
Firstpage
331
Lastpage
341
Abstract
We investigate the carrier dynamics of thin films of black silicon, amorphous hydrogenated silicon which under laser annealing forms a microstructured surface with extremely high broadband optical absorption. We use Raman spectroscopy to determine the degree of crystallinity of the annealed surfaces, and investigate the dependence on crystallinity and fabrication method of the photoconductivity. Time-resolved THz spectroscopy is used to determine the evolution of the carrier scattering time and confinement of carriers on the picosecond time scale. We conclude that a fabrication method with high energy leading edge of the annealing laser results in black silicon with the largest photon-to-electron conversion efficiency, largest mobility, and longest carrier lifetime.
Keywords
Raman spectra; amorphous semiconductors; carrier lifetime; carrier mobility; crystal microstructure; elemental semiconductors; high-speed optical techniques; hydrogenation; laser beam annealing; photoconductivity; semiconductor thin films; silicon; surface scattering; terahertz wave spectra; time resolved spectra; Raman spectroscopy; Si; Si:H; SiO2; amorphous hydrogenated silicon; black silicon; carrier dynamics; carrier lifetime; carrier mobility; carrier scattering; crystallinity; high-broadband optical absorption; laser annealing; microstructured surface; photon-electron conversion efficiency; thin films; time-resolved THz spectroscopy; ultrafast photoconductivity dynamics; Black silicon; carrier dynamics; terahertz (THz) spectroscopy; ultrafast conductivity;
fLanguage
English
Journal_Title
Terahertz Science and Technology, IEEE Transactions on
Publisher
ieee
ISSN
2156-342X
Type
jour
DOI
10.1109/TTHZ.2013.2255917
Filename
6507002
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