Title :
Micrometer resolution with (sub)-millimeter waves
Author :
van der Valk, N.C.J. ; Planken, P. C M
Author_Institution :
Delft University of Technology
Keywords :
Copper; Distortion measurement; Frequency; Image resolution; Microscopy; Optical imaging; Polarization; Probes; Submillimeter wave technology; Time domain analysis;
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
DOI :
10.1109/CLEOE.2003.1313492