DocumentCode :
3177026
Title :
Micrometer resolution with (sub)-millimeter waves
Author :
van der Valk, N.C.J. ; Planken, P. C M
Author_Institution :
Delft University of Technology
fYear :
2003
fDate :
22-27 June 2003
Firstpage :
429
Lastpage :
429
Keywords :
Copper; Distortion measurement; Frequency; Image resolution; Microscopy; Optical imaging; Polarization; Probes; Submillimeter wave technology; Time domain analysis;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
Type :
conf
DOI :
10.1109/CLEOE.2003.1313492
Filename :
1313492
Link To Document :
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