DocumentCode
3177026
Title
Micrometer resolution with (sub)-millimeter waves
Author
van der Valk, N.C.J. ; Planken, P. C M
Author_Institution
Delft University of Technology
fYear
2003
fDate
22-27 June 2003
Firstpage
429
Lastpage
429
Keywords
Copper; Distortion measurement; Frequency; Image resolution; Microscopy; Optical imaging; Polarization; Probes; Submillimeter wave technology; Time domain analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN
0-7803-7734-6
Type
conf
DOI
10.1109/CLEOE.2003.1313492
Filename
1313492
Link To Document