• DocumentCode
    3177726
  • Title

    In situ Fabrication and Electric Actuation of Telescoping Nanotube inside TEM through Hybrid Nanorobotic Manipulation System

  • Author

    Nakajima, Masahiro ; Arai, Fumihito ; Fukuda, Toshio

  • Author_Institution
    Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Aichi
  • fYear
    2006
  • fDate
    9-15 Oct. 2006
  • Firstpage
    1915
  • Lastpage
    1920
  • Abstract
    In situ fabrication and electrostatic actuation of a telescoping multi-walled carbon nanotube are presented. The inner core of the telescoping nanotube is actuated by applied bias voltage with a certain gap inside a vacuum chamber. From modeling analysis, the electrostatic forces are mainly driven force for actuation. At the experimental section, one end opened telescoping multi-walled carbon nanotube (MWCNT) is directly observed inside a transmission electron microscope (TEM). The telescoping MWNT is fabricated by peeling off outer layers through destructive fabrication process. Its inner core is extended and retracted with applied DC bias voltage. These processes have been done through a hybrid nanorobotic manipulation system, which are integrated nanomanipulators inside a scanning electron microscope (SEM) and a TEM. From experimental and analytical results, the possibility of nano-scale actuator applications using telescoping MWCNT with precision has been presented
  • Keywords
    carbon nanotubes; electrostatic actuators; micromanipulators; nanotechnology; scanning electron microscopes; transmission electron microscopy; DC bias voltage; TEM; destructive fabrication process; electric actuation; electrostatic actuation; electrostatic forces; hybrid nanorobotic manipulation system; in situ fabrication; integrated nanomanipulators; modeling analysis; nano-scale actuator applications; scanning electron microscope; telescoping multi-walled carbon nanotube; transmission electron microscope; Carbon nanotubes; Electrostatic actuators; Electrostatic analysis; Fabrication; Intelligent robots; Nanoscale devices; Numerical analysis; Scanning electron microscopy; Transmission electron microscopy; Voltage; List key index terms here; No mare than 5;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Intelligent Robots and Systems, 2006 IEEE/RSJ International Conference on
  • Conference_Location
    Beijing
  • Print_ISBN
    1-4244-0258-1
  • Electronic_ISBN
    1-4244-0259-X
  • Type

    conf

  • DOI
    10.1109/IROS.2006.282318
  • Filename
    4058660