Title :
Accurate topography measurement of large flat surfaces
Author :
Peter, F. ; Krey, S. ; Dumitrescu, E. ; Weingärtner, I. ; Wurm, M. ; Winkler, H.
Author_Institution :
TRIOPTICS GmbH, Wedel, Germany
Abstract :
A new technology for the precise topography measurement of reflecting flat surfaces is presented in this paper. The instrument is capable of scanning large flats of about 500 mm2. The instrument consists of a sensor head, which is an angle-measuring device, based on a CCD camera or a position sensitive detector (PSD). The sensor head includes a pentagon prism that reduces the pitch error in scan direction by a factor of about 100.
Keywords :
CCD image sensors; angular measurement; optical prisms; optical sensors; surface topography measurement; CCD camera; angle-measuring device; flat surfaces; pentagon prism; pitch error; position sensitive detector; sensor head; topography measurement; Apertures; Charge coupled devices; Charge-coupled image sensors; Instruments; Liquid crystal displays; Optical collimators; Position sensitive particle detectors; Silicon; Spatial resolution; Surface topography;
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
DOI :
10.1109/CLEOE.2003.1313530
