Title :
Non-flat and limited-area cathodes emission modeling
Author :
Munro, E. ; Zhu, X. ; Rouse, J. ; Katsap, V.
Author_Institution :
MEBS, Ltd., London
Abstract :
LaB6 emitters in e-beam tools are shaped as truncated cones, and may have limited emitting area surrounded by anti-emission coating. We report successful application of SOURCE software by MEBS, Ltd. to modeling these cathodes´ emission.
Keywords :
amplifiers; coating techniques; LaB6 emitters; SOURCE software; antiemission coating; e-beam tools; limited-area cathode emission modeling; Application software; Cathodes; Coatings; Current density; Electronic mail; Lithography; Optical computing; Shape; Software tools; Thermionic emission;
Conference_Titel :
Vacuum Electronics Conference, 2007. IVEC '07. IEEE International
Conference_Location :
Kitakyushu
Print_ISBN :
1-4244-0633-1
DOI :
10.1109/IVELEC.2007.4283275
