Title :
MEMS based integrated optical waveguide switch
Author :
Garnier, A. ; Valentin, Fedosov
Author_Institution :
Actionneur Electrostatique
Abstract :
We propose a versatile all-optical switch based on the flip-chip bonding of a micro-electro-mechanical system (MEMS) with a planar lightwave circuit (PLC). These two planar replication technologies are fully compatible with large scale integration and provide an attractive solution to fabricate the next generation devices for all-optical metropolitan or local area networks.
Keywords :
flip-chip devices; large scale integration; local area networks; metropolitan area networks; micro-optics; microswitches; optical communication equipment; optical fabrication; optical planar waveguides; optical switches; MEMS; MEMS fabrication; all-optical metropolitan area network; all-optical switch; flip-chip bonding; large scale integration; local area network; micro-electro-mechanical system; optical waveguide switch; planar lightwave circuit; Bonding; Integrated circuit technology; Integrated optics; Large scale integration; Microelectromechanical systems; Micromechanical devices; Optical switches; Optical waveguides; Programmable control; Switching circuits;
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
DOI :
10.1109/CLEOE.2003.1313589
