• DocumentCode
    3179431
  • Title

    Nano-milling of diffractive optics by F2-laser ablation

  • Author

    Herman, Peter R. ; Li, Jianzhao ; Nejadmalayeri, Amir H. ; Ng, Mi Li ; Yick, Andrew ; Ihlemann, Jurgen

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
  • fYear
    2003
  • fDate
    22-27 June 2003
  • Firstpage
    557
  • Abstract
    Diffractive optical elements with precise submicron surface structures have been excised on fused silica micro-optics and optical fibers by direct ablation with a pulsed 157-nm F2-laser source, circumventing multistep lithographic patterning and etching routines.
  • Keywords
    diffractive optical elements; etching; high-speed optical techniques; laser ablation; micro-optics; nanolithography; optical fibres; 157 nm; F2-laser ablation; F2-laser source; circumventing multistep lithographic patterning; diffractive optical element; etching routine; fused silica micro-optics; nano-milling; optical fibers; submicron surface structures; Atomic force microscopy; Biomedical optical imaging; Fiber lasers; Optical devices; Optical diffraction; Optical distortion; Optical fibers; Optical scattering; Optical sensors; Silicon compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
  • Print_ISBN
    0-7803-7734-6
  • Type

    conf

  • DOI
    10.1109/CLEOE.2003.1313619
  • Filename
    1313619
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3179431