Title :
Nano-milling of diffractive optics by F2-laser ablation
Author :
Herman, Peter R. ; Li, Jianzhao ; Nejadmalayeri, Amir H. ; Ng, Mi Li ; Yick, Andrew ; Ihlemann, Jurgen
Author_Institution :
Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
Abstract :
Diffractive optical elements with precise submicron surface structures have been excised on fused silica micro-optics and optical fibers by direct ablation with a pulsed 157-nm F2-laser source, circumventing multistep lithographic patterning and etching routines.
Keywords :
diffractive optical elements; etching; high-speed optical techniques; laser ablation; micro-optics; nanolithography; optical fibres; 157 nm; F2-laser ablation; F2-laser source; circumventing multistep lithographic patterning; diffractive optical element; etching routine; fused silica micro-optics; nano-milling; optical fibers; submicron surface structures; Atomic force microscopy; Biomedical optical imaging; Fiber lasers; Optical devices; Optical diffraction; Optical distortion; Optical fibers; Optical scattering; Optical sensors; Silicon compounds;
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
DOI :
10.1109/CLEOE.2003.1313619
