Title :
Dynamics of laser ablation in SiC
Author_Institution :
Riga Tech. Univ., Latvia
Abstract :
The aim of our work is to study dynamics of laser ablation in 6H-SiC at threshold intensity of laser radiation.
Keywords :
laser ablation; optical materials; silicon compounds; wide band gap semiconductors; 6H-SiC; SiC; laser ablation dynamics; laser radiation threshold intensity; Laser ablation; Laser beams; Laser modes; Laser theory; Optical pulses; Optical surface waves; Semiconductor lasers; Silicon carbide; Surface emitting lasers; Surface morphology;
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
DOI :
10.1109/CLEOE.2003.1313634
