Title :
Spot size dependence of femtosecond laser ablation of dielectrics
Author :
Martin, S. ; Hertwig, A. ; Krüger, J. ; Kautek, W.
Author_Institution :
Laboratorium fur Dunnschichttechnologien, Bundesanstalt fur Materialforschung und -prufung, Berlin, Germany
Abstract :
In this paper, dependence of femtosecond laser ablation threshold on the beam radius for barium borosilicate glass (Corning 7059) at a repetition rate of 1 kHz (1000 pulses per spot, 800 nm wavelength) is observed.
Keywords :
barium compounds; borosilicate glasses; high-speed optical techniques; laser ablation; optical glass; 800 nm; Corning 7059; barium borosilicate glass; dielectrics; femtosecond laser ablation; laser beam radius; spot size dependence; Area measurement; Dielectrics; Etching; Laboratories; Laser ablation; Laser applications; Laser beams; Optical materials; Optical pulses; Pulse measurements;
Conference_Titel :
Lasers and Electro-Optics Europe, 2003. CLEO/Europe. 2003 Conference on
Print_ISBN :
0-7803-7734-6
DOI :
10.1109/CLEOE.2003.1313637
