DocumentCode
3179810
Title
ZnO nano-rod based hydrogen sensor
Author
Mondal, Bikromadittya ; Hungyo, S. ; Roychaudhury, C. ; Saha, Hiranmay
Author_Institution
Dept. of Electron. & Comm. Eng., Tezpur Univ., Tezpur, India
fYear
2013
fDate
24-26 July 2013
Firstpage
376
Lastpage
378
Abstract
We report on the fabrication of Zinc Oxide (ZnO) nanorod based H2 sensor using a simple chemical route. ZnO films were deposited on Si substrate followed by annealing and used to detect hydrogen. The surface morphology and crystal structure of the fabricated ZnO system was investigated by scanning electron microscopy (SEM) and X-ray diffraction (XRD). The gas sensing of H2 in the concentration range 0.1-1 vol % in dry air was studied using current-voltage measurements. Gas sensing mechanism is discussed.
Keywords
II-VI semiconductors; X-ray diffraction; annealing; crystal structure; gas sensors; hydrogen; nanofabrication; nanorods; nanosensors; scanning electron microscopy; surface morphology; wide band gap semiconductors; zinc compounds; H2; SEM; Si substrate; X-ray diffraction; XRD; ZnO; annealing; crystal structure; current-voltage measurements; dry air; nanorod based hydrogen sensor; scanning electron microscopy; surface morphology; Annealing; Fabrication; Hydrogen; Sensors; Zinc oxide; Hydrogen sensor; ZnO nanorod;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Nanomaterials and Emerging Engineering Technologies (ICANMEET), 2013 International Conference on
Conference_Location
Chennai
Print_ISBN
978-1-4799-1377-0
Type
conf
DOI
10.1109/ICANMEET.2013.6609323
Filename
6609323
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