Title :
Development of All-metal Field Emitter Arrays for high Current Applications
Author :
Kirk, Eugenie ; Tsujino, Soichiro ; Sehr, Harald ; Vogel, Thomas ; Gobrecht, Jens ; Ganter, Romain ; Wrulich, Albin
Author_Institution :
Paul Scherrer Inst., Villigen
Abstract :
We are developing high-current field emitter arrays for the PSI-FEL project. By sputtering into molds and electroplating, we produce metal tips on a metal substrate. The single tip current is ~ 0.1 - 1.0 muA.
Keywords :
electroplating; field emitter arrays; substrates; PSI-FEL project; all-metal field emitter arrays; electroplating; high current applications; metal substrate; Cathodes; Electron emission; Field emitter arrays; Laboratories; Nanotechnology; Optical arrays; Sputtering; Substrates; Thermal conductivity; X-ray lasers; field emitter array; metal film; mold;
Conference_Titel :
Vacuum Electronics Conference, 2007. IVEC '07. IEEE International
Conference_Location :
Kitakyushu
Print_ISBN :
1-4244-0633-1
DOI :
10.1109/IVELEC.2007.4283345
