Title :
Experimental Study on 100GHz Two-Step LIGA-based Backward Wave Devices
Author :
So, J.K. ; Shin, Y.M. ; Jang, K.H. ; Won, J.H. ; Srivastava, A. ; Sattorov, M.A. ; Park, G.S. ; Kim, J.H. ; Chang, S.S.
Author_Institution :
Seoul Nat. Univ., Seoul
Abstract :
Two 100 GHz backward wave oscillators are being developed using two-step deep-etch X-ray lithography (LIGA) fabrication. Based on previous experiments, beam transmission issue was resolved in two ways by modifying the magnetic confinement system and the beam tunnel size. The coupled cavity BWO (CCBWO) is numerically predicted to have start- oscillation current of 30 mA and produce output power of 4 Watts at the beam condition of about 12 kV and 50 mA.
Keywords :
X-ray lithography; backward wave oscillators; cavity resonators; millimetre wave oscillators; backward wave oscillators; beam tunnel size; coupled cavity BWO; current 30 mA; frequency 100 GHz; magnetic confinement system; power 4 W; two-step LIGA-based backward wave devices; two-step deep-etch X-ray lithography fabrication; Circuit testing; Coupling circuits; Fabrication; Frequency; Laboratories; Optical coupling; Oscillators; Physics; Power generation; Programmable logic arrays; Backward Wave Oscillator; Microfabrication; X-ray Deep Etch Lithography;
Conference_Titel :
Vacuum Electronics Conference, 2007. IVEC '07. IEEE International
Conference_Location :
Kitakyushu
Print_ISBN :
1-4244-0633-1
DOI :
10.1109/IVELEC.2007.4283369
