NH3 sensing characteristics of pure and Al modified WO3 thin films

Author

Goyal, C.P. ; Ramgir, N.S. ; Sharma, Praveen Kumar ; Datta, Nipu ; Kaur, Manpreet ; Parey, V. ; Debnath, A.K. ; Haque, F.Z. ; Aswal, D.K. ; Gupta, Suneet K.

Author_Institution

Tech. Phys. Div., Bhabha Atomic Res. Centre, Mumbai, India

fYear

2013

fDate

24-26 July 2013

Firstpage

560

Lastpage

562

Abstract

Ammonia sensing properties of pure and Al modified WO₃ thin films prepared using RF sputtering have been investigated. Both the sensor films exhibited a maximum response at an operating temperature of 250°C. Modification with Al has been demonstrated to improve the response kinetics in particular the response time (6 min) in comparison to that of pure WO₃ (8 min) towards NH₃ (100 ppm). Interestingly, both the sensor films showed an increase in resistance i.e., a p-type behavior upon exposure to NH₃.

Keywords

aluminium; ammonia; electric resistance; gas sensors; sputter deposition; thin film sensors; thin films; tungsten compounds; Al modified thin film; NH₃; RF sputtering; WO₃; WO₃:Al; ammonia sensing characteristics; ammonia sensing properties; maximum response; operating temperature; p-type behavior; pure thin film; resistance; response kinetics; response time; sensor films; temperature 250 degC; time 6 min; time 8 min; Educational institutions; Radio frequency; Substrates; Temperature sensors; Al; NH3; RF sputtering; Sensor; Thin Film; WO3;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Nanomaterials and Emerging Engineering Technologies (ICANMEET), 2013 International Conference on

Conference_Location

Chennai

Print_ISBN

978-1-4799-1377-0

Type

conf

DOI

10.1109/ICANMEET.2013.6609364

Filename

6609364