Title :
NH3 sensing characteristics of pure and Al modified WO3 thin films
Author :
Goyal, C.P. ; Ramgir, N.S. ; Sharma, Praveen Kumar ; Datta, Nipu ; Kaur, Manpreet ; Parey, V. ; Debnath, A.K. ; Haque, F.Z. ; Aswal, D.K. ; Gupta, Suneet K.
Author_Institution :
Tech. Phys. Div., Bhabha Atomic Res. Centre, Mumbai, India
Abstract :
Ammonia sensing properties of pure and Al modified WO3 thin films prepared using RF sputtering have been investigated. Both the sensor films exhibited a maximum response at an operating temperature of 250°C. Modification with Al has been demonstrated to improve the response kinetics in particular the response time (6 min) in comparison to that of pure WO3 (8 min) towards NH3 (100 ppm). Interestingly, both the sensor films showed an increase in resistance i.e., a p-type behavior upon exposure to NH3.
Keywords :
aluminium; ammonia; electric resistance; gas sensors; sputter deposition; thin film sensors; thin films; tungsten compounds; Al modified thin film; NH3; RF sputtering; WO3; WO3:Al; ammonia sensing characteristics; ammonia sensing properties; maximum response; operating temperature; p-type behavior; pure thin film; resistance; response kinetics; response time; sensor films; temperature 250 degC; time 6 min; time 8 min; Educational institutions; Radio frequency; Substrates; Temperature sensors; Al; NH3; RF sputtering; Sensor; Thin Film; WO3;
Conference_Titel :
Advanced Nanomaterials and Emerging Engineering Technologies (ICANMEET), 2013 International Conference on
Conference_Location :
Chennai
Print_ISBN :
978-1-4799-1377-0
DOI :
10.1109/ICANMEET.2013.6609364
